The Physical Electronics Model 545 AUGER Microprobe (AES) uses a low energy (3-5kV) electron beam to excite the sample surface. The resultant "AUGER" electrons that are detected provide a fingerprint of the elements contained on the surface of the sample being analyzed. Combined with argon ion etching a profile of how the surface composition changes with depth can be obtained. Depth of field for the detected "AUGER" electrons is within 10 to 80 Angstroms depending on the sample composition. Profiling depth is limited to about 1 micron.

photo by Samuel O'Keefe