The KRATOS AXIS 165 X-ray Photoelectron Spectrometer (XPS) uses either a Magnesium or Monochromated Aluminum X-ray Source to excite the sample surface. The resultant photoelectrons that are detected provide a fingerprint of the elements contained on the surface and also provide chemical binding information based on the energy of the peaks. Used in conjunction with AUGER Spectrometry, samples can be argon ion etched to a particular depth for analysis of an area of interest (ie. interface between layers). Depth of field for the detected photoelectrons is within 10 to 80 Angstroms depending on the sample composition.

photo by Samuel O'Keefe